The spectrum form of square-wave controlled laser, optical signal heterodyne detecting device and principle of electrical signal demodulation are considered with emphasis. 文中着重分析了方波控制激光器的频谱形式、光信号外差探测装置和电信号解调原理。
An ultra-precision plane alignment device based on laser Moire signal is designed. High-accuracy position detection and X-Y-θ three-freedom full automatic precision plane alignment can be realized by the device. 设计了一种基于激光莫尔信号的超精密平面定位装置,该装置可实现高精度位置检测及X-Y-θ三自由度的全自动精密平面定位。